AI4Plasma II: Geometry-Aware Surrogate Modeling for Variable Electrode Gap GEC Plasmas
Hao Yang, Zhenyu Zou, Wenshuai Jie, Luowei Yin, Yufeng Wei, Daniel Zhengyu Huang, Zhichao Peng, Chun Chen 等 14 位作者
原文摘要
Industrial plasma process development requires broad exploration of operating and geometric parameters. Geometric parameters, particularly electrode spacing, affect discharge structure and processing uniformity. Exploring these parameter spaces through repeated high-fidelity simulations can be computationally expensive. Surrogate models can offer rapid predictions, but geometric variation complicates their application because the computational domain and discretization may change across samples. In this work, six geometry-aware surrogate models based on prescribed and learned geometry mappings, extended-domain representation, continuous coordinates, and geometry-native discretizations are compared in terms of their data requirements for accurate predictions of full plasma fields and ion density profiles near the wafer. The simulation dataset spans pressure, voltage, frequency, and electrode gap, with each reference case requiring an average simulation cost of 5.32 CPU h. To achieve a 2% mean error across the four plasma fields, prescribed-mapping Geo-FNO and Transolver require 100 training cases, compared with 250-1000 for the other models. Predicting ion density profiles near the wafer is more demanding and reveals larger differences among models, with prescribed-mapping Geo-FNO requiring the fewest training cases for the profile accuracy targets considered. To further reduce the data required for accurate predictions near the wafer, we introduce charge-separation weighting into the training loss, which reduces the prescribed-mapping Geo-FNO's minimum tested training requirement for a 5% profile error from 1000 to 100 cases. These results support prescribed-mapping Geo-FNO as a practical starting point for the variable-gap problem studied here when a suitable geometry mapping is available, while Transolver achieves the highest prediction accuracy with sufficient training data.
cs.LG · physics.plasm-ph